The aim of the module is to introduce students to the important micro and nano technologies of particular relevance to micro electro mechanical systems (MEMS).
Students will be introduced to the manufacturing processes developed in the micro and nanofabrication industry, and also to the processes proposed for the future. They will then see how these processes are currently being used to produce a wide range of miniature sensors and transducers which, in turn, will lead to the development of many new smart materials and applications.
The students will also be introduced to the latest nanomaterials a, such as carbon nanotubes, graphene and plasmonic nanoparticles. They will learn both the material properties and cutting edge applications of these nanomaterials.
The students will have the opportunity to visit the School's clean room and will be expected to develop their own ideas for future products based on micro and nano technology.
The module includes a MATLAB based demonstration of hologram generation software which are used for photolithography of MEMs devices.
SYLLABUS
MEMS, crystallography, material deposition, photo lithography, advanced lithography techniques, etching, micro mechanics, microelectronics, the design of applications like accelerometers, pressure sensors, biosensors and optomechanical systems. Students will use MATLAB to develop simple models of photo mesh used in photolithography techniques.
Learning Outcomes
By the end of the module students should be able to:
Demonstrate a comprehensive knowledge and understanding of the science of crystallography in relation to the construction of microsystem (MEMS) components and the importance of crystal structures in MEMS fabrication.
Demonstrate a comprehensive knowledge and understanding of the deposition processes and various types of deposition used for microsystems fabrication.
Demonstrate knowledge and understanding of the three types of solids (amorphous, polycrystalline, and crystalline).
Identify, classify and critically assess the performance of crystal orientation based on Miller indices.